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Magnetron Sputter for DWDM, CWDM and LanWDM filter mass production
2020-06-29 16:39
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• Substrate size: 3’~6’ diameter or 4 x 6’ diameter planetary jig
• Deposition source: 4 x 8’ targets with MF power supplies
• Film thickness monitor, Laser optical monitor with film uniformity automatic control
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