• Two 300mm crucibles
• 16cm RF ion source (1000mA, 1500V)
• Two diffusion pumps or cryopumps
• Dual zone temperature control
• General control platform and user friendly interface, allow customers set all control parameters of the coating machine by themselves
• Optical Monitor 400nm~1650nm, direct transmittance OMS/ Reflection OMS with chip changer
• Support third –party optical monitor.
